密集集成螺旋啁啾波导光栅的设计研究

论文总字数：25963字

摘 要

针对目前啁啾波导光栅研究相对较少和啁啾光栅实现宽带、高线性度延时与高精度延时面临的难题，本文通过理论研究、设计仿真、实验测试，研究了螺旋波导和啁啾波导光栅。

运用耦合模理论、传输矩阵法和有效折射率法等，基于实验室的聚合物光波导材料，设计了三阶线性啁啾波导光栅。深入分析了总啁啾量、侧壁波纹宽度、光栅长度三个参数以及运用切趾对线性啁啾波导光栅反射谱和时延谱特性的影响。研究表明：总啁啾量的增加使得反射谱带宽增加，反射率降低，反射谱峰顶和时延曲线振荡明显；侧壁波纹宽度的增加使得反射率和带宽增加，反射谱峰顶振荡减小，时延曲线振荡加剧；光栅长度的增加使得反射率和带宽增加，反射谱峰顶和时延曲线振荡明显；运用切趾使得反射谱平滑，中心带宽范围内时延曲线线性度好，但是带宽大幅减小。

通过对螺旋波导的优势和可行性的深入分析，本文实现了长度为10cm以上的有机聚合物螺旋波导的设计和制备。通过多方面综合考虑，设计出运用高斯切趾的10cm长的线性啁啾波导光栅。带宽达到5nm，群时延斜率达到-100ps/nm。

关键词：啁啾波导光栅，螺旋波导，切趾，反射谱，群时延

Abstract

Aiming at that there are relatively few studies on chirped waveguide gratings and it is hard to realize wideband, high linearity and high precision delay of chirped waveguide gratings, spiral waveguides and chirped waveguide gratings are studied through theoretical research, design, simulation and experimental test.

Using coupled mode theory, transfer matrix method and effective refractive index method, third-order linear chirped waveguide gratings are designed based on the polymer waveguide material in the laboratory. The effects of total chirp, sidewall corrugation width, grating length and apodization on the reflection and delay spectra of linear chirped waveguide gratings are analyzed. The results show that the increase of the total chirp increases the bandwidth of the reflection spectrum, decreases the reflectivity and makes the ripples of the peak of the reflection spectrum and the delay curve obvious; the increase of the sidewall corrugation width increases the reflectivity and bandwidth, decreases the ripples of the peak of the reflection spectrum and intensifies the ripples of the delay curve; the increase of the grating length increases the reflectivity and bandwidth, and makes the ripples of the peak of the reflection spectrum and the delay curve obvious; apodization makes the reflection spectrum smooth, and the linearity of the delay curve is good in the central bandwidth, but the bandwidth decreases greatly.

Through in-depth analysis of the advantages and feasibility of spiral waveguides, the design and fabrication of organic polymer spiral waveguides with a length of more than 10 cm are realized in this paper. A 10 cm long Gauss-apodized linear chirped waveguide grating is designed by considering many aspects. The bandwidth is 5 nm and the group delay slope is -100 ps/nm.

KEY WORDS: chirped waveguide grating, spiral waveguide, apodization, reflection spectrum, group delay

目 录

摘要 …………………………………………………………………………………………………………Ⅰ

Abstract ...…………………….……………………………………………………………………….……Ⅱ

第一章 绪论 ………………………………………………………………………………………………..1

1.1 引言 ……......................................................................................................................................1

1.2 色散 ………………………………………………………………………………….………….1

1.3 啁啾光栅研究现状 ……………………………….………………………………………….2

1.4 本文的主要研究内容 ………………………………………………………………………..4

第二章 啁啾波导光栅基础理论 ……………………………………………………...………………..6

2.1 耦合模理论 ……………………………………………………………...…………………….6

2.2 传输矩阵法 ……………...…………………………………………………………………….7

2.3 有效折射率法 ……………………………………..…………………………………………..7

2.4 啁啾波导光栅色散补偿原理 ………………………..……………………………………..8

第三章 螺旋啁啾波导光栅研究分析 …………………...…………………………………………….9

3.1 螺旋波导 ………………………….……………………………………………………………9

3.2 线性啁啾波导光栅特性分析 ………………………………...…………………………...10

3.2.1 总啁啾量对线性啁啾波导光栅特性的影响 …………………………..…….11

3.2.2 侧壁波纹宽度对线性啁啾波导光栅特性的影响 ………….……………….13

3.2.3 光栅长度对线性啁啾波导光栅特性的影响 ………….…….……………….15

3.2.4 切趾函数对线性啁啾波导光栅特性的影响 ………………..……………….16

3.3 直波导上线性啁啾波导光栅的设计与仿真 ….……………….………………………19

第四章 实验与结果 …………………………….……………………………………………….………24

4.1 掩模板设计 …………………………………………………………………………………..24

4.2 制备流程 ….………………..……………………………………………….………………..25

4.3 芯片测试 …………………………………….……………………………………………….26

第五章 总结与展望 ………….…………………………………………………………………………28

参考文献（References） ………………………………………………………………………………29

致谢 …………...……………………………………………………………………………………………31

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