论文总字数：34420字

摘 要

风速是重要的气象信息之一，风速计广泛应用在气象、交通、生活和生产领域。本论文利用丝网印刷技术在PET衬底上制备薄膜电阻。将该结构立于风洞之中，当风从正面吹过时，由于本身的柔性机理，PET衬底易沿着风场方向发生弯曲，从而导致衬底上的电阻发生形变。因此，通过测量电阻的阻值变化即可反推出待测风速的大小。

传统的丝网印刷技术中的银浆导电性能较好，电阻率较低，制备的电阻阻值小，这将导致电阻值的变化处于一个很小的量级，在一定程度上会给后续的测试工作带来困难。因此，本论文创新性的采用在银浆中掺入玻璃粉的方法，改进了印刷工艺，增大合成材料的电阻率，增大输出电阻值的变化量，提高风速测量精度。

利用上述方法，在不同厚度的衬底上制备了压阻式风速传感器，电阻阻值为可达到1000Ω以上，风速测试结果表明，传感器的灵敏度主要由薄膜厚度和可动薄膜长度决定，而与电阻长度几乎无关。此外，薄膜两侧电阻的性能会受到应力类型不同的影响。

最后，为了提高风速测量的灵敏度，并实现一维风速风向测量，本文创新性地设计了一种差分式电阻结构，利用丝网印刷技术分别在PET衬底的正面和背面制备相同的电阻。当风从衬底正面吹过时，由于压应力的作用，正面电阻阻值变大；同时，由于张应力的作用，背面电阻阻值减小。因此，正面电阻和背面电阻差值增大，在一定程度上提高了风速测量的灵敏度。

关键词：PET衬底，银浆厚膜电阻，压阻效应，风速传感器

Abstract

Wind speed is one of the most important meteorological information. Anemometer is widely used in meteorology, transportation, construction and agriculture. This paper uses screen printing technology to prepare thin film resistors on PET substrates. When the structure is in the wind tunnel, the wind blows from the front, the PET substrate is easily bent along the direction of the wind due to its flexible mechanism, causing the resistance on the substrate to be deformed. Therefore, by measuring the resistance change of the resistor, the wind speed can be measured.

In traditional screen printing technology, the silver paste has good conductivity, which means lower resistivity, and smaller resistance value, so the change of the resistance value can be very small, which will bring difficulties to the test. Therefore, this paper innovatively adopts the method of incorporating glass powder into silver paste and improves the printing process to increase the resistivity of synthetic materials, so the variation of output resistance will be increased and the accuracy of wind speed measurement will be improved.

Using the method above, a piezoresistive wind speed sensor is prepared on substrates of different thicknesses, and the resistance value can reach more than 1000 Ω. The wind speed test results show that the sensitivity of the sensor is mainly determined by the thickness of the film and the length of the movable substrate, but the length of the resistance is almost irrelevant. In addition, the performance of the resistors on both sides of the film is affected by the type of stress.

Finally, in order to improve the sensitivity of the sensor and implement one-dimensional wind speed and wind direction measurement, this paper innovatively designed a differential resistor structure, which uses screen printing technology to prepare the same resistance on both the front and back sides of PET substrate. When the wind blows from the front surface of the substrate, the resistance of the front surface becomes large due to the action of the compressive stress; at the same time, the resistance of the back surface resistance decreases due to the tensile stress. Therefore, the difference between the front surface resistance and the back surface resistance increases, and the sensitivity of the wind speed measurement is improved to some extent.

KEY WORDS: PET substrate, silver paste thick film resistor, piezoresistive effect, wind speed sensor

目录

摘 要 I

Abstract II

第一章 绪论 1

1.1引言 1

1.2 风速传感器研究现状 1

1.3 柔性器件研究现状 2

1.4 本论文的主要工作 3

第二章 制作工艺 4

2.1 银浆厚膜电阻 4

2.2 PET材料及其特性 5

2.3丝网印刷技术 5

2.4 工艺改进研究 7

2.4.1银浆混合染料的改进 7

2.4.2热烘工艺的改进 8

2.5 本章小结 8

第三章 单面传感器性能表征 9

3.1单面传感器设计 9

3.2 单面传感器制备 10

3.3单面传感器测试及结果分析 12

3.3.1测试方法 12

3.3.2测试结果 13

3.3.3结果分析 20

3.4 本章小结 23

第四章 双面传感器性能表征 24

4.1双面传感器设计 24

4.2 双面传感器制造工艺 24

4.3双面传感器测试及结果分析 27

4.3.1测试过程 27

4.3.2测试结果 28

4.3.3结果分析 37

4.4 本章小结 39

第五章 总结与展望 40

5.1实验总结 40

5.2实验问题与未来展望 40

致谢 42

参考文献 43

第一章 绪论

1.1引言

风是生活中处处可见的天气现象，它可以保持生态系统平衡，以支持地球上的生命。但有时风会变成灾难性的，例如龙卷风、飓风，它们具有毁灭性的破坏力。因此，获得不同建筑物，机械，交通工具等所受的风速和风压是十分必要的。风速评估也是气象学，航空学，建筑学，农业，运输业，能源行业等其他各种领域中重要的组成成分^[1]。

因此为了预防自然灾害，也为了在以上行业中取得更大的收益，精度高，响应快，功率低的风速传感器的开发十分重要。

1.2 风速传感器研究现状

传统的风速传感器是机械风速计，其利用诸如螺旋桨和杯子的机械装置。另一种机械风速计是叶片式风速计。但由于大型机械部件的惯性，这些传统传感器不能立即测量风速。而且尽管这种传感器的成本低，但它们容易遭受机械磨损，这限制到了它们的使用寿命^[2]。

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