双质量微角速度传感器设计与仿真

论文总字数：6990字

双质量微角速度传感器仿真程序

ANSYS仿真命令流：

1.模态分析命令流：

/PREP7

ET,1,SOLID186

MP,EX,1,1.3E11

MP,PRXY,1,0.27

MP,DENS,1,2330

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001, ,0,1 !模型缩放1E-6倍

ALLSEL

SMRT,8

MSHAPE,1,3D

MSHKEY,0

VMESH,all

EPLOT

!固定锚点

/SOLU

ASEL,S,LOC,Z,70E-6

DA,all,ALL

ALLSEL

!模态分析

/solu

ANTY,MODAL

MODOPT,LANB,8

SOLVE

FINISH

!后处理

/POST1

1. 谐响应分析
2. 驱动方向命令流：

/PREP7

ET,1,SOLID186

MP,EX,1,1.3E11

MP,PRXY,1,0.27

MP,DENS,1,2330

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001, ,0,1 !模型缩放1E-6倍

ALLSEL

SMRT,8

MSHAPE,1,3D

MSHKEY,0

VMESH,all

EPLOT

!固定锚点

/SOLU

ASEL,S,LOC,Z,70E-6

DA,all,ALL

ALLSEL

谐响应

/SOL

ANTYPE,HARMIC !定义分析类型，谐响应

HROPT,FULL !完全法(default)

DMPRAT,0.00025 !定义阻尼比

ASEL,S,,,139 !上侧驱动电容施加0.5uN正弦力

NSLA,S,1

*GET,Nnode,NODE,0,COUNT

F,ALL,FX,-1E-6/Nnode !载荷方向

ALLSEL

ASEL,S,,,40 !上侧驱动电容施加0.5uN正弦力

NSLA,S,1

*GET,Nnode,NODE,0,COUNT

F,ALL,FX,1E-6/Nnode !载荷方向

ALLSEL

HARFRQ,3556.2,3566.2 !指定简谐计算强制频率范围

NSUBST,25 !指定分析子步数

KBC,0 !斜坡加载

HROUT,OFF !以幅值和相位的形式输出

outres,basic,all

SAVE

solve

FINISH

检测方向命令流：

/PREP7

ET,1,SOLID186

MP,EX,1,1.3E11

MP,PRXY,1,0.27

MP,DENS,1,2330

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001, ,0,1 !模型缩放1E-6倍

ALLSEL

SMRT,8

MSHAPE,1,3D

MSHKEY,0

VMESH,all

EPLOT

!固定锚点

/SOLU

ASEL,S,LOC,Z,70E-6

DA,all,ALL

ALLSEL

谐响应

/SOL

ANTYPE,HARMIC !定义分析类型，谐响应

HROPT,FULL !完全法(default)

DMPRAT,0.00025 !定义阻尼比

ASEL,S,,,138 !上侧驱动电容施加0.5uN正弦力

NSLA,S,1

*GET,Nnode,NODE,0,COUNT

F,ALL,FY,1E-6/Nnode !载荷方向

ALLSEL

ASEL,S,,,546 !上侧驱动电容施加0.5uN正弦力

NSLA,S,1

*GET,Nnode,NODE,0,COUNT

F,ALL,FY,-1E-6/Nnode !载荷方向

ALLSEL

HARFRQ,3496.2,3506.2 !指定简谐计算强制频率范围

NSUBST,25 !指定分析子步数

KBC,0 !斜坡加载

HROUT,OFF !以幅值和相位的形式输出

outres,basic,all

SAVE

solve

FINISH

1. 热应力分析命令流：

!/PNUM,AREA,1

APLOT

/PREP7

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001,,0,1 !模型缩放1E-6倍

ALLSEL

wpoffs,893.5e-6,-740e-6,110e-6

WPROTA,0,0,180

BLC4,0,0,6855e-6/2,3808e-6/2

BLC4,0,0,-6855e-6/2,3808e-6/2

BLC4,0,0,6855e-6/2,-3808e-6/2

BLC4,0,0,-6855e-6/2,-3808e-6/2

asel,s,,,665,668,1

vext,all,,,,,500e-6

allsel

vglue,all

ET,1,SOLID186 !单元类型

MP,EX,1,1.3E11 !材料属性，硅

MP,DENS,1,2330

MP,NUXY,1,0.27

mp,kxx,1,148 !热变形系数

mp,alpx,1,2.6e-6 !热膨胀系数

mp,alpy,1,2.6e-6

mp,alpz,1,2.6e-6

MP,EX,2,0.63E11 !材料属性，玻璃

MP,DENS,2,2230

MP,NUXY,2,0.2

mp,kxx,2,100

mp,alpx,2,3.25e-6

mp,alpy,2,3.25e-6

mp,alpz,2,3.25e-6

!划分网格

vsel,s,,,6

vsel,a,,,7

vsel,a,,,8

vsel,a,,,9

SMRT,8

VATT,2,,1,0

MSHAPE,1,3D

MSHKEY,0

VMESH,all

!划分玻璃网格

VSEL,INVE !体反选

SMRT,8

VATT,1,,1,0

MSHAPE,1,3D

MSHKEY,0

VMESH,all

ALLSEL

FINISH

/SOLU

lsel,s,,,2003

lsel,a,,,2006

lsel,a,,,2035

lsel,a,,,2039

DL,all,,ALL,0

ALLSEL

!热分析

/SOLU

BFV,ALL,TEMP,673

TREF,273,

PSTRES,ON !打开预应力

SOLVE

FINISH

!查看变形

/POST1

PLNSOL,U,SUM

!有热应力的模态分析

/SOLU

ANTYPE,MODAL

MODOPT,LANB,10

MXPAND,10

PSTRES,ON !打开预应力

SOLVE

FINISH

1. 重力加速度分析：
2. x方向重力加速度分析命令流：

/PREP7

ET,1,SOLID186

MP,EX,1,1.3E11

MP,PRXY,1,0.27

MP,DENS,1,2330

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001, ,0,1 !模型缩放1E-6倍

ALLSEL

SMRT,8

MSHAPE,1,3D

MSHKEY,0

VMESH,all

EPLOT

!固定锚点

/SOLU

ASEL,S,LOC,Z,70E-6

DA,all,ALL

ALLSEL

/solu

ANTY,STATIC

ACEL,9.8 !施加1g加速度

SOLVE

FINISH

/post1

1. y方向重力加速度分析命令流：

/PREP7

ET,1,SOLID186

MP,EX,1,1.3E11

MP,PRXY,1,0.27

MP,DENS,1,2330

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001, ,0,1 !模型缩放1E-6倍

ALLSEL

SMRT,8

MSHAPE,1,3D

MSHKEY,0

VMESH,all

EPLOT

!固定锚点

/SOLU

ASEL,S,LOC,Z,70E-6

DA,all,ALL

ALLSEL

/solu

ANTY,STATIC

ACEL,,9.8 !施加1g加速度

SOLVE

FINISH

/post1

（3）z方向重力加速度分析命令流：

/PREP7

ET,1,SOLID186

MP,EX,1,1.3E11

MP,PRXY,1,0.27

MP,DENS,1,2330

VSEL,ALL

VLSCAL,all,,,0.000001,0.000001,0.000001, ,0,1 !模型缩放1E-6倍

ALLSEL

SMRT,8

MSHAPE,1,3D

MSHKEY,0

VMESH,all

EPLOT

!固定锚点

/SOLU

ASEL,S,LOC,Z,70E-6

DA,all,ALL

ALLSEL

/solu

ANTY,STATIC

ACEL,,,9.8 !施加1g加速度

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